Exhaust piping N2 heater (with built-in controller)
It prevents the deposition of powder regardless of the pipe shape, prevents clogging in the pipes through localized concentration, and extends the performance of the pump.
The exhaust line of semiconductor and liquid crystal manufacturing equipment is constantly at risk of contamination and blockage due to large amounts of powder. This product utilizes existing dilution N2 gas to easily and cost-effectively prevent and resolve these issues. Additionally, it significantly improves the overhaul cycle and lifespan of cryopumps, as well as demonstrating excellent effectiveness in purging load lock chambers.
